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Chapter 1. INTRODUCTION
Introduction
The MPC high performance digital mass flow controller has been developed for the
general industrial market featuring high speed and wide range flowrate control, the
following features are offered:
• The MPC integrates the advanced technologies of an ultra high speed response
flow velocity sensor, the µF (Micro Flow) sensor made using Azbil Corporation
proprietary technology, an ultra compact proportional solenoid valve, a new
flow channel structure and advanced actuator control technology achieves the
realization of the mass flow controller, which can be mounted on the panel of the
equipments.
• This is a compact (48 X 48 mm mask size) and light weight (approx. 300 g) mass
flow controller.
• Easy operation and easy mounting can be realized in good harmony when
replacing from a float type flow meter. In addition, the automatic control of mass
flow rate and remote flow setting change can be performed.
• There is almost no influence of temperature and pressure fluctuations by
integrating a µF sensor.
• A wide variety of functions are provided as a standard function to respond to the
various needs of the users.
• In case of a float type flow meter, the pressure and temperature compensation is
inevitable. In addition, if the design conditions (gas specific gravity, secondary
back pressure, etc.) are different from the conditions for use, the reading
value is required to convert by a specific calculation formula. However, these
inconvenient operation is no more required with the mass flow control.
Functions
• Multi-setup function
Up to four preset flowrate settings can be instantaneously switched to by key
operation or external switching input.
• Gas type switching function
The gas type to be used can be selected from the standard compatible gases by
key operation.
• Gas type setting function
The user can set any gas type conversion factors to accommodate the gases other
than standard compatible gases or mixed gases.
• Valve forced open/close function (selecting the operation mode)
The valve can be forcibly fully opened or fully closed by key operation or external
switching input.
• Slow start function
Sudden changes in the control flowrate, when control is started or when the
flowrate setting value is changed, can be suppressed.
The control speed can be changed in eight stages within the range from about 1
to 6 seconds.