BSWA 308 - Page 119

BSWA 308/309 BSWA Technology Co., Ltd
117
Annex 5 Corrections of Electrostatic Actuator
The following corrections are measured by BSWA EA002 electrostatic actuator and AS001
power supply.
Freq. [Hz]
Value [dB]
Freq. [Hz]
Value [dB]
Freq. [Hz]
Value [dB]
Freq. [Hz]
Value [dB]
200
0.000
630
0.043
2000
0.312
6300
2.184
224
0.002
710
0.053
2240
0.378
7100
2.651
250
0.004
800
0.065
2500
0.456
8000
3.204
280
0.006
900
0.080
2800
0.554
9000
3.840
315
0.009
1000
0.096
3150
0.678
10000
4.488
355
0.013
1120
0.116
3550
0.832
11200
5.264
400
0.017
1250
0.140
4000
1.020
12500
6.081
450
0.022
1400
0.170
4500
1.245
14000
6.960
500
0.027
1600
0.213
5000
1.488
16000
7.956
560
0.034
1800
0.260
5600
1.798
18000
8.664
20000
9.272
Expanded Uncertainties: U=0.19 (k=2) @ <=4kHz, U=0.34 (k=2) @ 4kHz~10kHz, U=0.39
(k=2) @ >=10kHz.
0.0
5.0
10.0
50.00 63.00 80.00
100.00 125.00 160.00 200.00 250.00 315.00 400.00 500.00 630.00 800.00
1000.00 1250.00 1600.00 2000.00 2500.00 3150.00 4000.00 5000.00 6300.00 8000.00
10000.00 12500.00 16000.00 20000.00
Corrections of Electrostatic Actuator
dB
Hz