CKD RAPIFLOW FSM3 Series User Manual

Diversified
High performance
Five types of gases can be measured with just one unit
Gas change function (Model with full scale ow rate of up to 200 L/min)
Air, nitrogen, argon, carbon dioxide, mixed gas (mixture of Ar:CO2 (8:2)) supported with this single ow rate sensor.
Gas types can be changed with gases button operations.
In the IO-Link specications, changing gases can be done remotely using the host controller.
* Contact a CKD representative if you have any requests for the mixed gases.
Mixed gases
(Argon + Carbon dioxide)
Carbon
dioxide
With the device's operation button
Argon
NitrogenAir
Change
gas
types
Bi-directional uid measurement
Contributes to reducing tact time
Flow direction can be measured voluntarily.
Forward direction Bi-direction Reverse direction
Clean-room specications
Anti-dust generation (P70) and oil-prohibited
specications (P80) available in the standard
lineup
Use according to the device grade is possible.
High precision/high-speed response
Repeatability: within ±1% F.S.
Display accuracy: within ±3% F.S.
Response time: 50 msec
Reduction of pressure loss
Up to 50% reduction with ow path redesign
MEMS
MEMS is short for Micro Electro Mechanical Systems, a compact device that applies
the ne processing technology used in manufacturing semiconductor integrated
circuits.

CKD RAPIFLOW FSM3 Series Specifications

General

Brand	CKD
Model	RAPIFLOW FSM3 Series
Category	Accessories
Language	English