DOD Technologies ChemLogic 1 - Page 47

47
DC-ITD-CL1andCL2MAN01-2018.A www.dodtec.com
NOV 2018 815-788-5200
CL1 & CL2 Manual
1-700-040
Toulene Diamine
TDA
4
60
ppb
10 ppb
10
20
12
1-400-020
Trichlorosilane^^
SiHCl3 (HCl)
0.2
15
ppm
5 ppm
5
10
12
1-400-020
Tungsten Hexafluoride^
WF6 (HF)
0.3
10
ppm
2 ppm
2
4
12