EBARA A07V - Page 19

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Table 3.1 Specification (A70W, A30W)
Model
A
70W
A
30W
Pum
p
in
g
S
p
eed
(
50 / 60Hz
)
7000 / 8400 L/min 3000 / 3600 L/min
Ultimate Pressure (50 / 60Hz) 0.27 / 0.13 Pa 0.4 / 0.27 Pa
Gas Inlet NW50
Connection
Gas Outlet NW40
Moto
r
2P 2.2 kW + 3.7 kW 2P 1.5 kW + 2.2 kW
Connection
Coupler (Ｒc 3/8)
Pressure
[Gauge Press.]
Supply ： Max 0.4 MPa
Differential Press. ： 0.1 MPa
Flow Rate Min. 3.5 L/min
Cooling
Water
Temperature Max. 30 deg C
Connection 1/4” Tube Fitting (Same as Swagelok®)
Pressure
[Gauge Press.]
Supply ： 0.1-0.7 MPa
Setting ： 0.04-0.07 MPa
N
2
Gas
Approx. Flow
Rate
[
Dilution 0 Mode
]
24-27 Pa m
3
/s
[3.4 Pa m
3
/s]
17-22 Pa m
3
/s
[3.4 Pa m
3
/s]
Connection
d50 mm×L50 mm
Pressure -196 Pa
Duct
Ventilation
Approx. Flow
Rate
0.5 m
3
/min
Brand
FOMBLIN Y-L VAC 25/6
BARRIERTA J100
DEMNUM S-65
KRYTOX VPF 1525
Lubrication
Oil
Quantity 0.8 L
Approximate Weight 380 kg 330 kg
Phase/Volt/Freq. 3 Phase, 200V (50 Hz), 200-220 V (60Hz)
Current Rating
(50 / 60 Hz)
29.5 / 28.1 A 19.7 / 18.5 A
Power
Supply
Connection
MS Series 22-22
(Japan Aviation Electronics Industry)
Control Signal 57 Series 50 (DDK. Ltd)
[Note] Approximate flow rate of N
2
gas shows a necessary total amount for seal N
2
and
dilution N
2
.
LCD controller displays only the flow rate of dilution N
2
.
EBARA Corporation