EBARA A07V - Page 20

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Table 3.2 Specification (A25S, A10S, A07V)
Model
A
25S
A
10S
A
07V
Pum
p
in
g
S
p
eed
(
50 / 60 Hz
)
2500 / 3000 L/min 1000 / 1200 L/min 700 / 840 L/min
Ultimate Pressure (50 / 60 Hz) 5.3 / 4.0Pa 5.3 / 4.0Pa 1.1 / 1.0 Pa
Gas Inlet NW50 NW40 NW40
Connection
Gas Outlet NW40
Moto
r
2P 3.7 kW 2P 2.2 kW 2P 1.5 kW
Connection
Coupler (Ｒc 3/8)
Pressure
[Gauge Press.]
Supply ：Ｍax． 0.4MPa
Differential Press.：Min． 0.1MPa
Flow Rate Min. 3.5 L/min
Cooling
Water
Temperature Max. 30 deg C
Connection 1/4” Tube Fitting (Same as Swagelok®)
Pressure
[Gauge Press.]
Supply：0.1-0.7 MPa
［Setting：0.04-0.07 MPa］
N
2
Gas
Approx.
Flow Rate**
17-20 Pa m
3
/s
[
3.4 Pa m
3
/
s
]
17-20 Pa m
3
/s
[
3.4 Pa m
3
/
s
]
15-19 Pa m
3
/s
[
3.4 Pa m
3
/
s
]
Connection
d50 mm×L50 mm d50 mm×L60 mm
Pressure -196 Pa
Duct
Ventilation
Approx. Flow
Rate
0.5 m
3
/min
Brand
FOMBLIN Y-L VAC 25/6
BARRIERTA J100
DEMNUM S-65
KRYTOX VPF 1525
Lubrication
Oil
Quantit
y
0.4 L 0.4 L 0.5 L
Approx. Weight 240 kg 220 kg 150 kg
Phase/Volt/Fre
q
. 3 Phase, 200V
(
50 Hz
)
, 200-220 V
(
60Hz
)
Current Rating
(
50 / 60 Hz
)
18.3 / 17.5 A 11.7 / 11.1 A 8.4 / 8.6 A
MS Series 22-22 MS Series 20-4
Power
Supply
Connection
(
Ja
p
an Aviation Electronics Industr
y)
Control Signal 57 Series 50 (DDK. Ltd)
** Numerals in brackets [ ] are flow rate in dilution-0 mode.
[Note] Approximate flow rate of N
2
gas shows a necessary total amount for seal N
2
and
dilution N
2
.
LCD controller displays only the flow rate of dilution N
2
.
EBARA Corporation