EBARA A07V - Page 26

(12)
[50Hz]
1
10
100
1000
10000
100000
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
[Pa]
[l/min]
A70W
A70W
A30W
A30W
[60Hz]
1
10
100
1000
10000
100000
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
[Pa]
[l/min]
A70W
A70W
A30W
A30W
Figure 3.1 Performance Curve (A70W, A30W)
EBARA Corporation