EBARA A07V - Page 27

(13)
[50Hz]
10
100
1000
10000
100000
[l/min]
A25S
A10S
1
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
[Pa]
[60Hz]
1
10
100
1000
10000
100000
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
[Pa]
[l/min]
A25S
A10S
Figure 3.2 Performance Curve (A25S, A10S)
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