(iii)
Important Precautions
DANGER
Keep out from under the pump when it is elevated.
Only qualified personnel should unload and lift the pump.
WARNING
Be careful not to overturn the pump when pushing or pulling it
sideways. The pump is narrow in comparison to its height.
WARNING
Only a qualified electrician, observing all national and local
regulations, should perform electrical work.
WARNING
Cut and lock out electrical power before beginning wiring or
maintenance work.
Do not switch on the power supply to the pump until work is
completed and pump and piping are back in safe operating
condition.
WARNING
Supply N
2
gas to the exhaust piping when necessary to dilute
flammable or toxic gases down to a safe concentration.
WARNING
Purge system with sufficient N
2
gas before removing and cleaning
the vacuum lines and exhaust piping.
Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.
Work only in locations with an emergency escape route.
WARNING
Do not convert the pump from one process to another without an
intervening overhaul. Gases or reaction products remaining in
the pump may react and lead to accidents or to the formation of
large amounts of byproduct.
WARNING
Check Safety Interlock functions periodically (every 6 months) to
confirm correct operation. See Appendix 2 for a description of
these interlocks.
WARNING
Connect exhaust from pumps handling process gases to an
appropriate exhaust abatement system that is equipped with
discharge quality monitors to provide warnings and to shut down
the process gas flow if concentrations exceed allowable limits.
WARNING
Check for gas leaks after initial installation of the piping and after
reassembly following maintenance or, at least, annually. Gas
leaks can result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air
into the pump. Replace o-rings as required to correct leaks.
See Appendix 4.
WARNING
Do not modify the pump or any of its parts without EBARA's
approval.
EBARA Corporation
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