(iv)
WARNING
Do not place the LCD controller on or near a surface with a
temperature exceeding 65ºC.
WARNING
The pump casing and exhaust piping become extremely hot
during operation and remain hot for some time after stopping.
Keep pump and exhaust piping away from contact with personnel
and flammable substances.
Do not remove pump enclosure panels during operation.
CAUTION
Disposal of process byproducts must be in strict accord with all
local and national environmental and safety regulations.
CAUTION
Dispose of printed circuit boards containing lithium batteries in
strict accord with all applicable local and national environmental
regulations.
CAUTION
The height of EBARA dry pumps may place the EMO button and
the LCD controller below the heights recommended in SEMI
S8-95. See Appendix 3.
The following safety warning labels appear on the pump covers:
High temperature warning
Hazardous voltage warning
Hazardous materials warning
Electric charge mark
Hazardous weight danger
High temperature warning
Hot surface may burn or cause injury.
Allow the piping and casing to cool before servicing.
EBARA Corporation
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