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Installation
A590-00-880 Issue D
3 Installation
Potential hazards on the dry pumping system include electricity, hot surfaces, process chemicals, Fomblin oil,
nitrogen and water under pressure.
Detailed safety information is given in Section 4 and Edwards Publication Number P300-20-000 'Vacuum Pump and
Vacuum System Safety'.
z Only Edwards engineers may install the dry pumping system. Users can be trained by Edwards to conduct the
tasks described in this manual, contact your local service centre or Edwards for more information.
z Do not remove the temporary cover or blanking plate from the dry pumping system inlet and exhaust until
you are ready to connect the dry pumping system to your vacuum or exhaust-extraction system. Do not
operate the dry pumping system unless the inlet and exhaust are connected to your vacuum and exhaust-
extraction system.
z Vent and purge the process system (if the dry pumping system is to replace an existing pumping system) with
nitrogen for 15 minutes before you start installation work. Refer to Section 5.
z Disconnect the other components in the process system from the electrical supply so that they cannot be
operated accidentally.
z Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any
maintenance the supply of these sources should be locked and tagged out.
z The pump system includes provision for ventilation extraction and secondary containment of oil and water
leaks. Any unintended overflows or spills must be removed immediately to avoid risk of slips.
z Obey all national and local rules and safety regulations when you install the dry pumping system. Consult
Edwards Publication Number P300-20-000 (Vacuum Pump and Vacuum System Safety) before you pump
hazardous materials. This publication is available on request: contact your supplier or Edwards.
z Route and secure cables, hoses and pipework during installation to avoid possible risk of trips.
z Be aware the exhaust TMS can be live and maintaining a high temperature of 150°C, even if the pumping
system power supply is isolated. Disconnect the pump system TMS if the pump is switched off and
disconnected.
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