Edwards iXM Series User Manual

▪ The gas module supplied with the pump is not intended as a safety feature. If
necessary
, install addional measures to monitor the ow of purge gas, for
example external sensors. Do not use the systems that are installed with the
load‑lock gas module on applicaons pumping ammable or pyrophoric materials.
For more informaon refer to semiconductor pumping applicaon guide (Publicaon no.
P41100090) or contact us.
Gas purges
WARNING: HAZARDOUS GASES
Risk of injury and damag
e to the equipment. If you use inert gas purges to dilute the
dangerous gases to a safe level, make sure that the pump is shut down if the inert gas
supply fails.
1. Switch on the inert gas purge to remove air from the pump and the exhaust
pipeline before you start the process.
2. Switch o the purge ow at the end of the process only aer the remaining
ammable gases or vapours have been purged from the exhaust pipeline.
▪ If liquids that produce ammable vapour
s are present in the pump foreline,
the inert gas purge to the dry pumping system must be supplied for all the
me liquid is present. Flammable liquids can possibly be present in the
foreline because of condensaon or can be carried over from the process.
▪ To calculate the ow rate of inert gas necessary for diluon, use the maximum
ow rate for the ammable gases/vapours that can occur. For example, if a
mass ow controller is being used to supply ammable gases to the process,
assume a ow rate for ammable gases that can possibly occur if the mass
ow controller is fully open.
3. Measure the inert gas ow r
ate connuously.
▪ If the ow rate falls below the requirement, stop the ow of ammable gases
or vapours to the pump.
4.6.6 Connect to the electrical supply
WARNING: PROTECTIVE EARTH CONNECTION
Risk of electric shock. The secondar
y protecve earth (ground) is necessary in case of
failure of the primary earth (ground) and because pump lters can cause high earth
leakage currents, refer to Table: General electrical data.
Contact us, if the system needs to be congured for use at dierent voltage range to
what is specied on the rang plate.
Solid state electronics protects the system from motor overload and short circuits. Refer
to Electrical data on page 18, when you select the overload protecon. Pump rang
informaon can be found on the label on the rear of the pump.
If the electrical supply to the system is connected through an Earth Leakage Circuit
Breaker (ELCB) or Residual Current Device (RCD) (depending on territory) it must be
applicable for protecon of equipment with a d.c. component in the fault current, and
applicable for short duraon switch-on surges, and for high leakage current (for
10/2020 - ©Edwards Limited
Page 36M56635880_D
M56635880_D - Inst
allaon

Edwards iXM Series Specifications

General

Brand	Edwards
Model	iXM Series
Category	Water Pump
Language	English