Edwards iXM Series

2. General descripon
2.1 Over
view
The iXM series of dry pumps are low energy systems. The range sets new standards for
medium duty process, capability and reliability, with pumps designed to give low cost of
ownership. The variants are designed for Etch and Plasma-Enhanced Chemical Vapor
Deposion (PECVD) processes. The pumps are available in four capacity classes:
▪ 200 m
3
/hr
▪ 600 m
3
/hr
▪ 1200 m
3
/hr
▪ 3000 m
3
/hr
The pump
s ar
e compable for 200 ‑ 230 V or 380 ‑ 460 V supply.
Figure 1 Front view of system
1. Front panel control 2. Levelling feet (4 o)
3. Cas
tors (4 o) 4. Seismic bracket (4 o if installed)
5. Extracon port 6. RF Earth (ground) cable
7. Pumped gas inlet connecon 8. Liing eyebolt
1. Front panel control 2. Levelling feet (4 o)
3. Castors (4 o) 4. Seismic bracket (4 o if installed)
5. Extracon port 6. RF Earth (ground) cable
7. Pumped gas inlet connecon 8. Liing eyebolt
10/2020 - ©Edwards Limited
Page 10M56635880_D
M56635880_D - General descripon