Figure 3 Applicaons
2.3 Advanced control and monitoring
EdCen
tra is a scalable, networked sub-fab equipment eet monitoring and data
acquision tool. EdCentra's comprehensive data capture lets the user improve
operaonal eciencies, through the:
▪ instantaneous monitoring of the equipment
▪ diagnoscs funcons such as historical trend analysis
▪ reporng on aggr
egated data
For advanced applicaons, we have a tool that allows the pumping system conguraon
to be changed.
For some applicaons it can be necessary to adjust the system operang temperatures
to align with process demands. Contact your supplier to discuss the requirements and
refer to System operang temperature conguraon on page 65 for instrucons on
conguraon.
Contact us for more informaon.
2.4 Green Mode
The Green Mode funcon decreases ulity consumpon of the system while on standby.
The Green Mode funconality is controlled with a PDT accessory or the tool through a
MicroTIM accessory. Refer to Accessories on page 93. Contact us for advice on
applicaon and acvaon of the available accessories.
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Page 12M56635880_D
M56635880_D - General descripon