Edwards iXM Series User Manual

3.9 Tracer gas analysis
Tr
acer gas fugive emission tesng has been carried out in accordance with the SEMI S6
Standard.
Table 13 Tracer gas test parameters
Test parameters
Tracer gas N
2
O (Nitrous Oxide)
Tracer gas concentraon 100%
T
racer gas release rate 5 slpm (standard litres per minute)
Tracer gas release points Exhaust ange on the iXM200/iXM600/iXM1200 pump
Process gas Nitrogen
Table 14 Tracer gas test system parameters
System parameters Units iXM3000
iXM1200
iXM600
iXM200
Extracon ow rate:
From port on top of enclosure
From port on exhaust extracon kit
m
3
/h
396.4 107.7 121.2
Volume of enclosure
m
3
0.423 0.122 0.077
Free air volume of enclosure
m
3
0.265 0.072 0.040
Air changes per minute 24.9 27.9 50.0
Hardware conguraon:
▪ 100 mm duct c
onnected to port on
top of enclosure
▪ Exhaust extracon cover kit
installed
Yes
Yes
Yes
Yes
Yes
Yes
Note:
The recommended e
xtracon ow rate for iXM200, iXM600, iXM1200 is 180 m
3
/h.
Table 15 Worst case test results
Process gas
Chemical
name
Maximum
process
g
as ow
(slm)
TLV/LEL
(ppm)*
25%
TLV/LEL
(ppm)
N
2
O re-
lease
r
ate
(slm)
Maximum
N
2
O de-
tected
outside
enclosure
(ppm)
ERC
(ppm)
Pass/Fail†
Diuoromethane CH
2
F
2
0.2 1000 250 5 3 0.12 Pass
Methane CH
4
1 1000 250 5 3 0.60 Pass
Carbon Monox-
ide
CO 0.5 25 6.25 5 3 0.30 Pass
Hydrogen H
2
40 4000 1000 5 3 24.00 Pass
Nitrous Oxide N
2
O 15 50 12.5 5 3 9.00 Pass
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Page 23M56635880_D
M56635880_D - Technical data

Edwards iXM Series Specifications

General

Brand	Edwards
Model	iXM Series
Category	Water Pump
Language	English