ESPEC Platinous ESL-3C Series - Power Supply Work; Primary Power Supply Requirements

Platinous User’s Manual 39
Installation
5.3 Power Supply Work
5.3.1 Primary Power Supply Requirements
The primary power supply must satisfy the following requirements:
•The rated voltage is 208/230V 3Ph 60Hz, or 200/220V 3Ph 50Hz. Voltage fluctua-
tion must be within +/- 5% (or within +/- 10% while the chamber is running.)
•Maximum current per voltage specification, minimum cable diameter, and switch
fuse capacity must be as below:
*Refer to NEC or applicable code requirements for feeder wire size.
TABLE 5.10.
PRIMARY POWER SUPPLY REQUIREMENTS
Chamber Model Max. Current (A)
Main Power Breaker/
Service Size (A)*
ESL
229 40
329 40
434 50
ESU
224 40
324 40
431 50
ESX
232 40
332 40
438 50
ESZ
232 40
332 40
438 50