ferrotec CARRERA - 2.2 Intended Use

Version 1.3_15 EN
6
High Voltage Power Supply
Type: CARRERA
2 Overview and Intended Use
2.1 Overview CARRERA-System
Fig. 1 Overview CARRERA system
The complete evaporator package consist of the following:
1 High voltage power supply HVP
2 Electron beam evaporator controler GENIUS with hand
remote control
3 Filament power supply (FPS)
4 Electron beam evaporator
5 Vacuum chamber
6 Grounding rod