Inficon PCG554 - Pressure Measurement Characteristics; Output Signal vs. Pressure Data

tina56e1-f (2015-09) 19
2.1 Output Signal vs. Pressure
Measurement range 0.61 … 10.23 V
Output signal U [V]
Pressure p
0.0
0.61
3.02.52.01.51.0
0.5
4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E+06
1E–05
Error
O
mbar
Pa
Torr
p = 10
0.778(U-c)
⇔
U = c +1.286log
10
p
valid in the range 5×10
-5
mbar <p< 1500 mbar
U p c U p c
[V] [mbar] 6.143 [V] [micron] 2.448
[V] [µbar] 2.287 [V] [Pa] 3.572
[V] [Torr] 6.304 [V] [kPa] 7.429
[V] [mTorr] 2.448
where p pressure
U output signal
c constant (pressure unit dependent)