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tina56e1-f (2015-09)

Contents

Product Identification 2

Validity 3

Intended Use 5

Functional Principle 5

Trademark 5

Patents 5

Scope of Delivery 5

Safety 8

1.1 Symbols Used 8

1.2 Personnel Qualifications 8

1.3 General Safety Instructions 9

1.4 Liability and Warranty 9

2 Technical Data 10

2.1 Output Signal vs. Pressure 19

2.2 Gas Type Dependence 24

3 Installation 25

3.1 Vacuum Connection 25

3.2 Power Connection 28

3.2.1 FCC 68, 8-pin Connector 29

3.2.2 D-Sub, 9-pin Connector 30

3.2.3 D-Sub HD, 15-pin Connector 31

3.2.4 D-Sub HD, 15-pin, RS485 INF Connector 32

3.2.5 DeviceNet Connector 33

3.2.6 Profibus Connector 34

3.2.7 EtherCAT Connector 35

4 Operation 36

4.1 Status Indication and Displays 36

4.2 Gas Type Dependence 40

4.3 Switching Functions SP1, SP2 40

4.4 ATM Setpoint 47

4.5 Diagnostic Port (RS232C Interface) 49

4.6 DeviceNet Operation 50

4.7 Profibus Operation 53

4.8 EtherCAT Operation 54

Inficon PCG554 User Manual

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