Inficon TPG300 - 3 Technical Data; Pirani; Cold Cathode Measurement Board CP300 C9

6 IG9972BEN (2017-09) Plug-In Boards.om
3 Technical Data
Number of measurement circuits 1 each
Gauges TPR018, IKR085 (both ITER)
Display range (signal output)
1)
Pirani
Cold cathode
mbar
mbar
5×10
-4
… 1000
5×10
-9
… 1×10
-2
Measurement range
1)
Pirani
Cold cathode
mbar
mbar
1×10
-2
… 100
1×10
-8
… 5×10
-3
Cable length
Pirani, max.
Cold cathode, max.
m
m
100
60
2)
… 100
Power supply cold cathode gauges
Operating voltage
Measurement current
kV
µA
3.3
≤600
Signal output
Measured value, analog
Error message
Current, max.
Output resistance
V
V
mA
Ω
0 … +10
>11.5
2
400
Reaction time (10  90%) for sudden
pressure step
Pirani
<10
-3
 10
3
mbar ms <50
Cold cathode
10
-9
⇔ 10
-6
mbar
ms <100
Connection, equipment side
Pirani gauge
Cold cathode gauge
Signal output
female
female
female
Amphenol C91E, 6-pin
SHV coaxial
ø2 mm
Weight kg
≈0.21
1)
N
2
-equivalent
2)
when using the lower measurement range limit (→  9)
3.1 Pirani / Cold Cathode
Measurement Board
CP300C9