Inficon SQC-310 User Manual

Name: Inficon SQC-310
Brand: Inficon
Rating: 4 (1 reviews)

192 pages

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OPERATING MANUAL

SQC-310

Deposition Controller

PN 074-550-P1D

over

age

Introduction15
Related Operating Manuals16
General Safety Information17
How to Contact INFICON19
SQC-310 Specifications20
Power21
Display22
Film Parameters23
Unpacking and Inspection24
Accessories25
Handheld Remote Controller26
Initial Power-On Verification27
Introduction29
Front Panel31
Rear Panel32
System Connections33
Ground Requirements34
Establishing Earth Ground35
Rack Mount36
Installation37
Rack Adapter38
Installation39
Interfacing SQC-310 to CI-100 Crucible Indexer40
Individual (Binary - as Defined by CI-100) I/O Setup41
Interfacing SQC-310 to EBS-530 E-Beam Sweep Controller42
Thin Film Deposition Overview45
Thin Film Deposition Phases46
SQC-310 Menu Overview47
Main Screen, Menu 149
Main Screen, Menu 250
Main Screen, Menu 351
Quick Edit Menu52
Process Menus54
Process Menu - Edit Layer56
Layer Copy, Insert, and Delete Menus59
Film Menus61
Film Edit Menu62
Film Conditioning Menu65
Film Deposit Controls Menu66
Film Configure Sensor Menu68
System Menu69
Input and Relay Menus71
Logic Menu74
Creating a Logic Statement75
Logic Statement Conditions (IF)76
Logic Statement Actions (THEN)79
Sensors and Sources Menu80
Source Setup83
Introduction85
USB Port86
Accessing Network Settings in Windows XP87
Accessing Network Settings in Windows 7 and Windows 890
How to Change the SQC-310 IP Address92
SQC-310 Communications Protocol93
Command Packet (Host to SQC-310 Message)94
Response Packet (SQC-310 to Host Message)95
Calculating the CRC96
SQC-310 Commands97
Get/Set Film Parameter Examples99
Get/Set System Parameter Examples100
Get/Set Process Parameter Examples101
Get/Set Layer Parameters102
Get/Set Layer Parameter Examples103
Get/Set Material Parameter Examples104
Get/Set Input and Relay Parameter Examples106
Get/Set Sensor and Source Parameters107
Get/Set Sensor and Source Parameter Examples108
Get/Set Logic Statement Parameters109
Get Num Channels110
Get Readings Examples111
Get Output Rate Example112
Get Sensor Frequency/Crystal Life113
Get/Set Output Power114
Set Active Process Example115
Get Run State116
Get Run State Examples117
Start/Stop Download/Upload Session118
Java ®121
Introduction123
Main Window124
Data Log Menu126
Instrument Window128
Process Tree130
Film Menu131
Materials Menu132
Sensor Setup Menu133
Source Setup Menu134
Digital I/O Setup Menu135
Logic Statements Menu138
Creating Logic Statements140
Graph Menu141
Communications Setup Menu142
View Menu144
Help Menu145
Troubleshooting Guide147
Cleaning160
Spare Parts162
Persistent Crystal Fail Indication163
Importance of Density, Tooling and Z-Ratio165
Determining Tooling166
Laboratory Determination of Z-Ratio167
Control Loop169
Identifying a Fast or Slow Source171
Control Loop Tuning Procedure172
Basics177
Monitor Crystals178
Period Measurement Technique180
Z-Match Technique181
A.1 Introduction183

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Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English

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Inficon SQC-310 User Manual

Table of Contents

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Inficon SQC-310 Specifications

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