How to troubleshoot if Inficon Controller SQC-310 does not turn on?
If the Inficon Controller SQC-310 does not turn on, first, ensure the line cord is properly connected and the rear panel power switch is in the ON position. If that doesn't work, check that the line voltage is within the specified range for the SQC-310. Also, inspect the fuses in the power inlet and replace them if they are open with the specified fuse.
What to do if Inficon Controller SQC-310 locks up?
If the Inficon Controller SQC-310 “locks up”, make sure all covers and panels are securely fastened. Ensure that sensor, oscillator, source output, and I/O cables, along with the line cord, are at least 30.5 cm (1 ft.) away from high voltage/high power cables or any other sources of electrical noise. Check that ground wires or straps are short with a large surface area to minimize impedance to ground, and that they connect to an appropriate earth ground.
Why does my Inficon Controller display 'Crystal Fail'?
If the crystal fail is displayed on your Inficon Controller, install a new crystal. If there are two crystals installed, remove the extra one, or reverse the crystal orientation. Inspect the crystal for scratches; if scratched, replace it. Ensure that the oscillator and sensor are connected to all active sensor channels set to On in the Edit Layer screen. Also, make sure that you are using a crystal with a starting frequency appropriate for the SQC-310 frequency range and change the Min/Max Frequency settings in the System Menu screen.
How to fix noisy Rate, Thickness, and Frequency readings on Inficon SQC-310?
If the Rate, Thickness, and Frequency readings are noisy on your Inficon Controller, ensure that the in-vacuum cable length does not exceed 78.1 cm (30.75 in.) and use the 15.2 cm (6 in.) cable between the oscillator and feedthrough. Also, keep the sensor, oscillator cables, source output cables, I/O cables, communications cable, and line cord at least 30.5 cm (1 ft.) away from high voltage/high power cables or other sources of electrical noise. Check that ground wires or straps are short with a large surface area to minimize impedance to ground and connect to an appropriate earth ground.
What to do if Inficon SQC-310 displays Crystal Fail during deposition?
If the crystal fail is displayed during deposition before the normal life of the crystal is exceeded on your Inficon Controller, use a shutter to shield the sensor during source conditioning and move the crystal farther away (at least 25.4 cm (10 in.)) from the source. Replace the crystal, and consider using an Alloy crystal if appropriate for the deposited material. Visually inspect the crystal for an uneven coating and correct the shutter or sensor positioning if needed. Also, Poor Rate control may be triggering Xtal Quality. Unstable/noisy crystal may be triggering Xtal Stability. Replace crystal. Correct any external conditions (e-beam arcing, thermal changes, etc.) triggering Xtal Stability. You can change the values, or disable Xtal Quality and/or Xtal Stability.
Why is the frequency reading incorrect on my Inficon SQC-310 Controller?
If the frequency reading in the Sensor Information screen of your Inficon Controller is an incorrect value, ensure that the in-vacuum cable length does not exceed 78.1 cm (30.75 in.) and use the 15.2 cm (6 in.) cable between the oscillator and feedthrough.
How to resolve large thickness reading excursions during deposition on Inficon SQC-310?
If the thickness reading has large excursions during deposition with your Inficon Controller, replace the crystal. Ensure a straight line from the center of the source to the center of the crystal is perpendicular to the face of the crystal. Also, check water flow rate and temperature for sensor cooling.
Why is the frequency reading unstable on my Inficon SQC-310?
If the frequency reading in the Sensor Information screen of your Inficon Controller is unstable or drifting, control the vacuum chamber temperature. Move the crystal farther away from the source (at least 25.4 cm (10 in.) from source). Check sensor water cooling for correct flow and temperature. Avoid condensation by turning off cooling water to the sensor before opening the vacuum chamber to air, and then flow heated water above the dew point of the room through the sensor when the chamber is open. Replace crystal. Use an ohmmeter to check electrical continuity and isolation of cables.
Critical safety information, including definitions of terms.
Essential safety precautions for operating the device.
Specific requirements for proper earth grounding.
Detailed technical specifications for the SQC-310.
Diagram and explanation of system connections.
Critical safety guidelines for proper system grounding.
Detailed procedure for setting up an earth ground connection.
Introduction to the device's menu system.
Detailed explanation of Main Screen Menu 1 functions.
Detailed explanation of Main Screen Menu 2 functions.
Detailed settings for configuring individual layers.
Configuring system-wide parameters and settings.
Description of the data communication protocol.
Comprehensive list of available commands for control and data retrieval.
Comprehensive guide to diagnose and resolve common issues.
Explanation of PID control loop parameters and their function.
Detailed guide for tuning the PID control loop for stable deposition.
General| Model | SQC-310 |
|---|---|
| Category | Controller |
| Type | Thin Film Deposition Controller |
| Measurement Technology | Quartz Crystal Microbalance (QCM) |
| Channels | 1 |
| Input Voltage | 100-240 VAC |
| Operating Temperature | 15 to 35°C |
| Measurement Principle | Quartz Crystal Microbalance (QCM) |
| Sensor Compatibility | Inficon QCM Sensors |
| Power Requirements | 50/60 Hz |
| Communication Interfaces | RS-232 |
| Storage Temperature | -20 to 70 °C |
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