Inficon SQC-310

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PN 074-550-P1C
SQC-310 Operating Manual
3.12.3 Sensors and Sources Menu
The Sensors and Sources menu allows the types of sensors and sources in the
system to be configured, particularly multi-crystal sensors and multi-pocket
sources (see Figure 3-22).
Figure 3-22 Sensor 1 Edit
3.12.3.1 Sensor Setup
Crystal Tooling: Adjusts for the difference in measured deposition rate between
the sensor and the substrate being coated.
Figure 3-23 Crystal tooling
In Figure 3-23(a), the sensor will measure less rate or thickness than is actually
deposited on the substrate due to the positioning of the sensor above the
substrate. In Figure 3-23(b), the sensor will measure more rate of thickness than is
actually deposited on the substrate due to the positioning of the sensor below the
substrate..