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PN 074-550-P1C
SQC-310 Operating Manual
3.2 SQC-310 Menu Overview
When powered on, SQC-310 briefly displays the model number (SQC-310 or
SQC-310C) and firmware version information, then the Main screen is displayed
(see Figure 3-2).
Three menus on the Main Screen control SQC-310 operation. The buttons
associated with each of these menus provides access to sub menus (see Figure
3-3). This chapter describes the function of each setting in each menu. It is
arranged by Main Screen menus, then by major sub menus.
NOTE: If prompted for a password, use the buttons along the left of the screen to
enter the password. The top button is 1, the bottom button is 6. Pressing
the control knob is 7.
Figure 3-2 Main screen
The first line of the Main screen displays the name of the currently selected
process. After the process name is the layer that will run when Start Layer is
pressed, and the total number of layers in the process. Run # displays the number
of times this process has been run.
The second line of the Main screen is a status line. It displays the current phase
of the deposition cycle and other status or error messages. When the process is
running, the right side of this line displays the process elapsed time.
Three graphs are available for display: rate, rate deviation, or output power. The
graphs scale the vertical axis and scroll the horizontal axis based on the data
displayed.
Below the graph are two lines that display deposition readings (four lines for
SQC-310 equipped with option card or for SQC-310C). This section displays
current rate, rate deviation, thickness, and output power. Alternatively, the section
can display current rate, rate setpoint, thickness, and thickness setpoint.
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