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PN 074-550-P1C
SQC-310 Operating Manual
Chapter 3
Operation
3.1 Thin Film Deposition Overview
This section provides general background information of the steps involved in a
thin film deposition process and the operation of SQC-310.
3.1.1 Definitions
Several key terms will be used repeatedly throughout this manual. It is important to
understand each of these terms.
Material: A physical material to be deposited. A database of 100 materials is stored
in SQC-310. Three parameters completely define a material: Name, Density, and
Z-Ratio (also called Z-Factor). Common materials, densities, and Z-Ratios are
listed in Appendix A.
Film: A film describes in detail how a material will be deposited. It includes the
material definition and all of the preconditioning, deposition, and postconditioning
variables necessary to accurately deposit the material. Because the film definition
does not include rate and thickness information, a single film can be used in several
different layers and processes. SQC-310 stores up to 50 films.
Layer: Layers are the basic building blocks of processes. A layer consists of a film
and the thickness and rate setpoints for that stage of the process. Layers also
define which outputs and sensors will be used at that point in the process.
Codeposition of multiple films occurs when more than one output is active during a
layer. SQC-310 stores up to 1000 layers.
Process: A process is a sequence of layers to be deposited. SQC-310 stores up
to 100 processes.
Phase: A phase is a step or stage in the deposition cycle. Preconditioning phases
include Ramp 1, Soak 1, Ramp 2, and Soak 2. Deposit phases include Indexer
Rotate, Shutter Delay, Deposition, and Deposition Rate Ramps. Postconditioning
phases include Feed Ramp, Feed, and Idle Power.
SQC-310 stores the recipes and provides the operating functions required
to control thin film deposition processes. A typical thin film deposition cycle is
displayed in Figure 3-1.
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