Inficon SQC-310 User Manual

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PN 074-550-P1C
SQC-310 Operating Manual
3.1.2 Thin Film Deposition Phases
Figure 3-1 Typical thin film deposition cycle
The cycle can be broken into three distinct phases:
 Preconditioning (ramp/soak)
 Deposition
 Postconditioning (feed/idle)
During preconditioning, power is supplied in steps to prepare the evaporation
source for deposition. Once the material is near the desired deposition rate,
material deposition begins.
During deposition, the PID loop adjusts the evaporation source power as required
to maintain the desired rate. In codeposition, multiple films can be deposited
simultaneously.
When the desired thickness is reached, the evaporation source is set to
idle power. At this point the process may be complete, or deposition of another
layer may begin.

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English