Inficon SQC-310 User Manual

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PN 074-550-P1D
SQC-310 Operating Manual
2.4 System Connections
Figure 2-3 System connections
-310
Sensor
In-Vacuum
Cable
Feedthrough
15.2 cm (6 in.)
Oscillator
Source
Shutter
BNC
Cables
Source Power Supply
Output
Control Input
Ground Wire/Strap
BNC Cable
Table 2-4 System components
Sensor Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced regularly.
In-Vacuum Cable A coaxial cable that connects the sensor to the feedthrough.
Feedthrough Provides isolation between vacuum and atmosphere for electrical
connections, water, air, and/or purge gas tubes.
15.2 cm (6 in.)
BNC Cable
Provides a flexible connection from the feedthrough to the
oscillator.
Oscillator Contains the electronics to oscillate the quartz crystal.
Total cable length to the crystal should be under 102 cm (40 in.).
Sensor Input
BNC Cable
Connects the oscillator to the SQC-310 sensor input.
Lengths up to 22.8 m (75 ft.) are acceptable.
Control Output
BNC Cable
Connects the SQC-310 output to the source power supply control
voltage input.
Ground Wire/Strap A wire or strap that connects the vacuum system to
the SQC-310 ground terminal. The wire or strap is important for
noise rejection (see section 2.5).

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English