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PN 074-550-P1C
SQC-310 Operating Manual
7.6 Control Loop Tuning Procedure
This section will help in adjusting SQC-310 PID control loop settings to achieve a
stable deposition process. Control loop tuning is a trial and error process and there
is no "best" procedure to accomplish this task. It may take several adjustments to
achieve the desired tune. This section, assumes an understanding of Chapter 3,
Operation and proper setup of SQC-310 as described in Chapter 2, Installation.
1 Set System Parameters
In the System Menu:
Set Measurement Period to 0.25.
Set Rate Filter Alpha to 1 (no filtering) to see the noise of the system.
Set System Tooling to 100%.
Confirm Simulate Mode is Off.
2 Create a One-Layer Test Process
In the Film Menu:
Create a new film.
Enter the Zfactor (Z-Ratio) and the material Density.
Set Film Tooling to 100%.
In the Process Menu:
Create a new process that has the new film as its only layer.
Set Init Rate to the desired rate.
Set Final Thickness to a large value to prevent the layer from completing.
Select the proper Sensor(s) and Source.
Leave the other layer parameters at the default values.
3 Test the Setup
In the Sensor Info. Menu:
Verify the Sensor Status is On and a stable frequency is displayed.
4 Using the SQC-310 Comm software, Activate data Logging.
NOTE: This step is optional. It is helpful for troubleshooting if there are any
issues while tuning the control loop.
5 Exit to the main screen and press Next Menu until the Auto/Manual button is
displayed. Press Auto/Manual to enter Manual mode, then press Start Layer.
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