Inficon SQC-310 User Manual

7 - 2
PN 074-550-P1C
SQC-310 Operating Manual
6 Determine the new density value with equation [1]:
[1]
where:
D
1
= Initial density setting
T
x
= Thickness reading on SQC-310
T
m
= Measured thickness
7 A quick check of the calculated density may be made by programming
SQC-310 with the new density value and observing that the displayed
thickness is equal to the measured thickness, provided that the thickness
displayed on SQC-310 has not been zeroed between the test deposition and
entering the calculated density.
NOTE: Slight adjustment of density may be necessary in order to achieve T
x
= T
m
.
7.3 Determining Tooling
1 Place a test substrate in the system substrate holder.
2 Make a short deposition and determine actual thickness.
3 Calculate tooling from the relationship shown in equation [2]:
[2]
where
T
m
= Actual thickness at substrate holder
T
x
= Thickness reading on SQC-310
TF
i
= Initial tooling factor
4 Round off percent tooling to the nearest 0.1%.
5 When entering this new value for tooling, T
m
will equal T
x
if calculations are
done properly.
NOTE: It is recommended that a minimum of three separate evaporations be
made when calibrating tooling. Variations in source distribution and other
system factors will contribute to slight thickness variations. An average
value tooling factor should be used for final calibrations.
Density g cm
3
D
1
T
x
T
m
-------



=
Tooling (%) TF
i
T
m
T
x
-------



=

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English