Inficon SQC-310 User Manual

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PN 074-550-P1D
SQC-310 Operating Manual
Chapter 1
Introduction
1.1 Introduction
INFICON SQC-310 and SQC-310C are quartz crystal microbalance technology
based deposition controllers, providing a unique combination of accuracy and
powerful features in a compact, low-cost controller.
Figure 1-1 SQC-310
The standard SQC-310 is a sequential layer thin film deposition controller that can
monitor two quartz crystal sensors and control one of two evaporation sources at
a time. Eight process control relays and eight digital inputs are included to support
a broad range of external devices. The number of sensors, outputs, and digital I/O
can be doubled with an optional expansion card. SQC-310C is a thin film controller
that is capable of codeposition by monitoring four quartz crystal sensors and
controlling four sources simultaneously. Sixteen process control relays and sixteen
digital inputs are included. Both controllers come standard with RS-232 and USB
communications with an option to replace USB with Ethernet communications.
NOTE: SQC-310 and SQC-310C are both referred to as SQC-310 in this manual.
If there is a reason to distinguish between the two models, the SQC-310 or
SQC-310C model number will be called out.
Please review the entire manual for detailed operational, programming, and
safety information.

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English