Inficon SQC-310 User Manual

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PN 074-550-P1D
SQC-310 Operating Manual
1.4 SQC-310 Specifications
1.4.1 Measurement
Crystal Frequency Range. . . . . . . . . 6.5 to 1.0 MHz (adjustable)
Frequency Resolution . . . . . . . . . . . .±0.012 Hz over 0.25 s measurement interval
Frequency Accuracy . . . . . . . . . . . . .0.001%
Measurement Rate. . . . . . . . . . . . . . 0.10 to 1.0 s (adjustable)
Thickness and Rate Resolution . . . . .±0.015 Å @ tooling/density/z-ratio =
100/1/1, fundamental frequency = 6 MHz,
0.25 s measurement interval
Thickness Accuracy . . . . . . . . . . . . . 0.5% typical
Rate Accuracy . . . . . . . . . . . . . . . . . 0.5% typical
1.4.2 Sensor
Sensor Inputs . . . . . . . . . . . . . . . . . . 2 (+2 optional), 4 (SQC-310C)
Measurement Technique . . . . . . . . . Conventional (Active) Oscillation
Sensor Type . . . . . . . . . . . . . . . . . . . Single, Dual, Rotary
1.4.3 Source
Number of Sources . . . . . . . . . . . . . 2 (+2 optional), 4 (SQC-310C)
Control Voltage. . . . . . . . . . . . . . . . . 0 to ±10 V into 2 k load
Resolution . . . . . . . . . . . . . . . . . . . . 15 bits
1.4.4 Digital I/O
Digital Inputs. . . . . . . . . . . . . . . . . . . 8 (+8 optional), 16 (SQC-310C)
Functions . . . . . . . . . . . . . . . . . . User-selected (see Chapter 3, Operation)
Input Rating . . . . . . . . . . . . . . . . 5 V (dc), non-isolated
Relay Outputs. . . . . . . . . . . . . . . . . . 8 (+8 optional), 16 (SQC-310C)
Functions . . . . . . . . . . . . . . . . . . User-selected (see Chapter 3, Operation)
Relay Rating. . . . . . . . . . . . . . . . 30 V (rms) or 30 V (dc), 2 A maximum

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English