Inficon SQC-310 User Manual

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PN 074-550-P1C
SQC-310 Operating Manual
4.3.3.1 Get/Set System Parameter Examples
Get the Period and System Tooling:
Command: !(B? 1 2(65)(117)
Response: !/A1,25 2,100 (81)(73)
Set the Period and System Tooling:
Command: !.B 1,25 2,100(84)(133)
Response: !$A(53)(151)
Set the Display Rate vs. Time Graph:
Command: !&BA 1(81)(35)
Response: !$A5 (53)(151)
To Turn Remote Mode ON:
Command: !&BB 1(128)(160)
Response: !$A5 (53)(151)
4.3.4 Get/Set Process Parameters
Get Command Message = <CommandID><Process Number><?><Space>
<Parameter>
Get Response Message = <A><Parameter><Comma><String|Value>
Set Command Message = <CommandID><Process Number>
<Space><Parameter> <Comma><String|Value>
Set Response Message = <A>
Number Layers is the number of layers in a process, counting CoDep layers as 1
layer. Actual Layers is the total number of layers. For example, a process with one
CoDep layer (using two films) would have Number Layers = 1 and Actual Layers =
2.

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English