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PN 074-550-P1D
SQC-310 Operating Manual
Thickness . . . . . . . . . . . . . . . . . . . . The current film thickness, based on the
average of all sensors assigned to the
output (kÅ).
Power . . . . . . . . . . . . . . . . . . . . . . . The current film thickness, based on the
average of all sensors assigned to the
output (%).
5.4 Data Log Menu
On the Main window toolbar, click File >> Data Log to display the Data Log menu
which configures the data logging functions (see Figure 5-2).
Figure 5-2 Data log menu
Data is saved in a comma delimited format for easy viewing or importing into a
spreadsheet. For example:
Start: Date: 6/27/2014 Time: 8:32:27
Time,Phase,Out1Rate,Out1Dev,Out1Thk.....Sens1Rate,Sens1Thk,Sens1Freq.....
0.1, Shutter Delay, 0.00,100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
0.5, Deposit, 0.00,100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
0.8, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
1.4, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
2.0, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
2.7, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
3.3, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
3.9, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
4.5, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
5.2, Deposit, 0.00,-100.0,0.000.....Sensors:, 0.00,0.000,5950000.000.....
End: Date: 6/27/2014 Time: 8:32:32
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