Inficon SQC-310 User Manual

5 - 3
PN 074-550-P1D
SQC-310 Operating Manual
Phase. . . . . . . . . . . . . . . . . . . . . . . . Displays the phase of the process that is
currently running. A typical sequence of
phases is: Ramp 1, Soak 1, Ramp 2,Soak 2,
Shutter Delay, Deposit, and Idle power.
Time . . . . . . . . . . . . . . . . . . . . . . . . . Displays the elapsed time since the process
was started.
Start/Reset Process . . . . . . . . . . . . Start/Stop the active process. Graphing and
data logging will begin/end when this button
is clicked. This button will also reset the
process time.
Start/Stop Layer . . . . . . . . . . . . . . . Start/Stop the active layer. Graphing and
data logging will begin/end when this button
is clicked. This button will also reset the
process time.
Next Layer
. . . . . . . . . . . . . . . . . . . . . Moves to the next layer of the process. If the
current layer is the last layer, wraps to layer 1.
Start Man Layer. . . . . . . . . . . . . . . . Manually starts the active layer.
Zero Thickness . . . . . . . . . . . . . . . . Zeroes the average and sensor thickness
reading on SQC-310.
Auto->Manual . . . . . . . . . . . . . . . . . Allows for the power outputs to be controlled
manually or automatically using a PID loop.
Can be set before the Start button is pressed
or during the process. A slider bar will appear
next to each output and the power can be
adjusted for any active outputs. The
maximum power setting will determine the
maximum range of the scale for the slider
bar.
Graph. . . . . . . . . . . . . . . . . . . . . . . . Displays readings from SQC-310. A graph of
the average rate, rate deviation, or output
power can be selected on the Main screen
View menu.
Below the graph are readings from each of the SQC-310 deposition control loops.
The readings are arranged by outputs. If multiple sensors are assigned to a single
output, the readings will be the average of the assigned sensors.
Rate . . . . . . . . . . . . . . . . . . . . . . . . . The current rate of deposition (Å/s), based on
the average of all sensors assigned to the
output.
Deviation . . . . . . . . . . . . . . . . . . . . . The deviation of the output rate from the rate
setpoint (%).

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English