1 - 12
PN 074-550-P1D
SQC-310 Operating Manual
1.6.2.2 Handheld Remote Controller
Handheld Remote Controller, 3 m (10 ft.) cable. . . . PN 782-900-017
1.6.2.3 Rack Mount Kits
3U Rack Extender - mounts one
SQC-310 controller in a
48.3 cm (19 in.) rack . . . . . . . . . . . . PN 782-900-007
3U Rack Adapter- mounts two
SQC-310 controllers in a
48.3 cm (19 in.) rack . . . . . . . . . . . . PN 782-900-016
1.6.2.4 Crystal Sensors
NOTE: X represents feature selections particular to that sensor. For help
identifying a sensor, contact INFICON. (Refer to section 1.3, How to
Contact INFICON, on page 1-5.)
Front Load Single Sensor . . . . . . . . . . . . . . . . . . . . PN SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . PN DL-AXXX
UHV Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . PN BK-AXF
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . PN CDS-XXFXX
Cool Drawer Dual Sensor . . . . . . . . . . . . . . . . . . . . PN CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-618-G1
ALD Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-71X-GX
CrystalSix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-446-G1
RSH-600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN 15320X-XX
Crystal 12 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PN XL12-1XXXXX
NOTE: Shuttered sensors require a solenoid valve (PN 750-420-G1).
NOTE: CrystalSix and Crystal12 crystal position detection feature cannot be used
with the SQC-310.
NOTE: CrystalTwo switch is not compatible with SQC-310.
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