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PN 074-550-P1D
SQC-310 Operating Manual
1.4.9 Display
Type . . . . . . . . . . . . . . . . . . . . . . . . . LCD/Color/TFT/14.5 cm (5.7 in.) Diagonal
Format . . . . . . . . . . . . . . . . . . . . . . . QVGA
Resolution . . . . . . . . . . . . . . . . . . . . 320 x 240 pixels
Backlighting . . . . . . . . . . . . . . . . . . . LED
Thickness Display Resolution . . . . . 0.001 kÅ
Rate Display Resolution. . . . . . . . . . 0.01 or 0.1 Å/s
Power Display Resolution . . . . . . . . 0.01%
Data Display Rate . . . . . . . . . . . . . . 1 Hz
Graphic Display Functions . . . . . . . . Rate, Deviation, Power
Readouts . . . . . . . . . . . . . . . . . . . . . Thickness, Rate, Power
1.4.10 Process Parameters
NOTE: A Process is a sequence of layers.
# Processes . . . . . . . . . . . . . . . . . . . 100
# Films . . . . . . . . . . . . . . . . . . . . . . . 50
# Layers (total all processes) . . . . . . 1000
1.4.11 Layer Parameters
NOTE: Layer is a Film, plus these values.
Initial Rate . . . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s
Final Thickness . . . . . . . . . . . . . . . . 0.0 to 999.990 kÅ
Time Setpoint . . . . . . . . . . . . . . . . . . 0 to 5999 s
Thickness Limit . . . . . . . . . . . . . . . . 0.0 to 999.99 kÅ
Start Mode . . . . . . . . . . . . . . . . . . . . Auto/Manual
Output Select . . . . . . . . . . . . . . . . . . Src1/Src2/Src3/Src4
Max Power . . . . . . . . . . . . . . . . . . . . 0.0 to 99.9%
Min Power . . . . . . . . . . . . . . . . . . . . 0.0 to 99.9%
Slew Rate. . . . . . . . . . . . . . . . . . . . . 0.0 to 100.0%/s
Sensor Select (1 to 4) . . . . . . . . . . . On/Off
Rate Dev. Attention . . . . . . . . . . . . . 0.0 to 99.9%
Rate Dev. Alert . . . . . . . . . . . . . . . . . 0.0 to 99.9%
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