EasyManuals Logo

Inficon SQC-310 User Manual

Inficon SQC-310
192 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Page #116 background imageLoading...
Page #116 background image
4 - 32
PN 074-550-P1C
SQC-310 Operating Manual
4.3.21 Get Run State
Get Command Message = <CommandID><?><Parameter>
Get Response Message = <A><Parameter><Comma><String|Value>
Table 4-22 Get run state parameters
Cmd ID Description Parameters
V Returns the Phase #, Process
Elapsed Time (displayed on
SQC-310 main screen), Process #,
Active Layer of the active process,
and Manual/Automatic control
(0/1).
0 Stopped
1 Crystal Verify
2 Initialize Layer
3 Manual Start Layer
4 Crystal Rotate
5Pocket Rotate
6 PreCond (CoDep only)
7Ramp 1
8 Soak 1
9Ramp 2
10 Soak 2
11 Soak Hold
12 Shutter Delay
13 Deposit
14 Rate Ramp
16 Timed Power
17 Rate Sample Hold
18 Rate Sample
19 Crystal Switch
20 Feed Ramp
21 Feed Soak
22 Idle Ramp
24 Crystal Fail
25 Stop Layer
26 Manual Power
27 Snsr Feedback Timeout
28 Src Feedback Timeout
31 Invalid Crystal Position
32 Invalid Pocket Position
33 Sample Hold
34 Sample Continuous
35 Crystal Fail, Halted
36 Next Crystal
37 Rate Sample Shutter Delay
46 Control Delay
47 Sensor Shutter Error
48 Source Shutter Error

Table of Contents

Questions and Answers:

Question and Answer IconNeed help?

Do you have a question about the Inficon SQC-310 and is the answer not in the manual?

Inficon SQC-310 Specifications

General IconGeneral
BrandInficon
ModelSQC-310
CategoryController
LanguageEnglish

Related product manuals