Inficon SQC-310

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PN 074-550-P1C
SQC-310 Operating Manual
Tooling is the ratio of the actual substrate deposition rate or thickness, to that
measured by the sensor. If the rate/thickness reading is low, increase the tooling
value. If the rate or thickness reading is high, decrease the tooling value.
Shutter: If the sensor has no shutter, select none to disable sensor shutter
features. If the sensor is a typical dual sensor, with a shutter that is only activated
when the primary sensor fails, select Dual. For other sensor shutters that activate
when the sensor is used, select Yes.
Shutter Delay: If the Yes option is selected for shutter, enter the time required
for the shutter to open and stabilize.
Number of Positions: This parameter defines the number of crystals available for
that sensor input. For single head sensors, set to one. For a typical dual sensor
head with separate oscillators and sensor connections, set to one because there
is only one crystal for each sensor input. For a rotary type multi-crystal head, set to
the number of crystals available.
Current Position: If a multi-crystal sensor has position feedback, this
parameter is not needed. For sensors with only In Position or no position
feedback, enter the current crystal position.
Control Type: Defines the type of crystal or pocket position control required for
a multi-crystal sensor.
Manual: Not under control of SQC-310. With manual control, SQC-310 will
stop the process upon the completion of the current layer. If the next layer
requires a different crystal position, a message is displayed requesting the
number of the crystals required. Once the position has been changed,
press the Continue button.
Direct: Used when the actuating device is driven directly. In this case the
controller creates one or two outputs, one for each available direction, to
drive a motor or solenoid.
Drive Type: Defines the drive method or direction for Direct control.
Up, Down, Fast, and Inline: Select Up to create a single relay output
used to increment the sensor to the next crystal position. Down works
identically, except the relay output is labeled Sensor Drive Down.
Select Fast to create both up and down outputs. SQC-310 will then
determine the fastest direction to the target crystal position by activating
the appropriate output. The Inline drive type informs SQC-310 that
continuous travel in one direction is not possible. Therefore to get from
position 6 to 1, the direction must be down until 1 is reached.
Single Step and Double Step: Used when multi-crystal sensor heads
are actuated by pulsing a pneumatic value. CrystalSix rotary sensor
uses Double Step. Crystal 12 and RSH-600 rotary sensors use Single
Step.