LEYBOLD MAG integra Series - Page 15

Description
15300324726_002_C0 - 10/2016 - © Leybold
mbar
10
-2
10
-3
10
-4
10
-1
Vorvakuumdruck
101
100
1
10
0.1
mbar·l/s
Durchfluss
Stickstoff
MAG W 1300
Argon
0
200
400
600
800
1000
1200
1400
1600
1800
2000
l/s
Saugvermögen
mbar
10
-2
10
-3
10
-4
10
-5
10
-6
10
-1
Hochvakuumdruck
MAG W 1300
Argon
Stickstoff
Helium
Wasserstoff
2200
Fig. 1.3 Pumping speed curves and operation diagrams for the MAG W 1300
temporary
Continuous
operation
Nitrogen
Throughput
Pressure
Nitrogen
Argon
Argon
Helium
Hydrogen
Inlet pressure
Pumping speed