LEYBOLD MAG integra Series - Page 18

Description
18 300324726_002_C0 - 10/2016 - © Leybold
mbar
10
-2
10
-3
10
-4
10
-1
Druck
101
100
1
10
0.1
mbar·l/s
Durchfluss
0
1000
2000
l/s
Saugvermögen
mbar
10
-2
10
-3
10
-4
10
-5
10
-6
10
-1
Hochvakuumdruck
MAG W 2200
Wasserstoff
Stickstoff
Helium
Stickstoff
MAG W 2200
Argon
200
400
600
800
1200
1400
1600
1800
2200
Argon
Fig. 1.6 Pumping speed curves and operation diagrams for the MAG W 2200
temporary
Continuous
operation
Nitrogen
Throughput
Pressure
Nitrogen
Argon
Helium
Inlet pressure
Pumping speed
Argon
Hydrogen