Description
19300324726_002_C0 - 10/2016 - © Leybold
Ø d1
h
94
114
b
17°
17°
260
98
Ø d2
s2
s1
s3
7
I
Vorvakuum Sperrgas
Ø d
1
h
h
1
DN
251
114
iP iPL
l
1
l
2
s
4
s
5
DN ø d1 ø d2 h h1 I l1 l2 b s1 s2 s3 s4 s5
200 ISO-F 285 285 305 442 311
1)
311
1)
332
1)
420
1)
42 140 0 15 241
200 CF 254 285 335 472 307 307 – 416 32 164 0 – –
250 ISO-F 335 317 325 463 335 331 374 442 39 154 0 14 259
250 CF 305 317 330 467 335 322 – 432 29 173 0 9 285
250 ISO-F 335 349 355 492 343 340 392 450 34 165 0 12 272
250 CF 305 349 372 509 339 340 – 446 26 187 0 8 302
1) 4 mm for cooling coil
Fig. 1.7 Dimensional drawing of the pumps, dimensions in mm
MAG W
1300
1600/1700
2200
Forevacuum
connection
Purge gas
connection
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