Fig. 2 MAG.DRIVE Front panel
1 Description
1.1 System overview
The Leybold MAG pumping system consists of:
• The MAG W 1600, MAG 2000, or MAG W 2000
turbopump
The MAG are turbomolecular pumps utilizing magne-
tic bearings.They are designed to evacuate vacuum
chambers down to pressure values in the high-vacu-
um range and to pump high gas throughputs.
The C versions are equipped with a purge gas valve
and a Pt 100 temperature sensor for the cooling water
temperature.
The CT versions are additionally equipped with a
temperature management system (TMS) to control
the base flange temperature.
The pumps are available with 2 different rotors:
MAG version: 11 turbo pump stages
MAG W version: 6 turbo pump stages and 1 drag
stage.
• The MAG.DRIVE L or MAG.DRIVE L2
frequency converter
The electronic converter converts the single-phase
line supply voltage into a three-phase DC voltage to
drive the pump motor. It also evaluates measured sig-
nals and controls
- the pump functions
- the temperature management system (TMS) and
- the active magnetic bearing system
• A cable set consisting of:
- BEARING cable
- TMS cable
- DRIVE cable
Fig. 3 Cable Set