5 Maintenance
The MAG is maintenance-free. Wear only occurs at the
touch-down bearings when hard shocks have to be sup-
ported or when the pump frequently runs down without
venting.
Maintenance is also required after removing the bearing
cable during operation of the pump.
Under these conditions the rotor can not be controlled by
the magnet bearing and the pump will have a full run
down on the touch down bearing.
5.1 Removing the pump
from the system
MAG which have been used in semiconductor processes
are contaminated by semiconductor process gases.
Most of these gases form acids when exposed to moist
air which causes serious corrosion damage to the pump.
To prevent corrosion damage during storage and ship-
ping, use the seal kit.
Failure to seal a contaminated MAG voids the warranty.
The seal kit contains the following
- dry cartridge,
- plastic cap for forevacuum connection flange,
- plastic adhesive film and
- aluminum cover and screws for the high-vacuum
connection flange.
Proceed as follows to seal the turbomolecular pump
immediately after removing it from your process.
Purge the pump for two hours with the backing pump
running.This helps to remove a large quantity of the pro-
cess gases from the pump. We recommend purging the
pump via the intake flange and the purge valve with
approx. 200 sccm.
Press the STOP button at the MAG.DRIVE and wait until
the pump has come to a standstill.
Afterwards turn the mains switch to the „0“ position.
The cables between the MAG and MAG.DRIVE may be
disconnected only after the MAG has come to a full still-
stand and the mains is switched off.
Warning
When the pump has been pumping hazar-
dous gases, ensure that proper safety pre-
cautions are taken before opening the inta-
ke or exhaust connections.
Use gloves or protective clothing to avoid
skin contact with toxic or highly corrosive
substances. Work under a fume hood if
available.
Disconnect the cables from the pump.
Disconnect the forevacuum line.
Disconnect the cooling water lines. Remaining cooling
water may flow out. Protect all parts below.
Remove 10 of the 12 bolts which hold the intake flange.
The 2 remaining bolts must be directly opposite.
Support the pump with a lift-truck at the base plate and
remove the 2 remaining bolts.
Clean the intake and forevacuum connection flange as
necessary for good adhesion of tape.
Place the dry cartridge into the forevacuum port. Don’t
use loose crystals.
Firmly seal all ports with plastic adhesive film.
Cover the forevacuum connection port with its plastic
cap.
Seal the high-vacuum connection flange with the cover
and the screws.
Pack the pump so that it may not be damaged during
transportation. Particularly protect the flanges, the coo-
ling water connectors and the current feedthrough.
Only for MAG 1600
As the plastic adhesive film is too large for the high-vacu-
um connection flange slit it a little bit at the screw holes.
GA 05.130/3.02 - 05/98
Maintenance
62
To Next Page
Loading...
