MKS 651D Series User Manual

Appendix E: RS-232 Message Summary
140
W: Active
Sensor/Channel
Select/Zero
Adjust
0 = L/A/D
1 = H/A/D
3 = H/H/D
4 = L/A/E
5 = H/A/E
7 = H/H/E
8 = L/L/D
: = L/L/E
RS-232 Message Summary (Continued)
Command Description Request Response
Ex value
x=H or L
value: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10
21 = 20
07 = 50
08 = 100*
22 = 200
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 = 1.33 mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332
Sensor Range
High or Low
R 33
(High)
R55
(Low)
Ex value
x:H or L
value: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10
21 = 20
07 = 50
08 = 100
22 = 200
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 =1.33mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332
F value
value: 00 = Torr*
01 = mTorr
02 = mBar
03 = µBar
04 = kPa
05 = Pa
Pressure Units R 34
F value
value: 00 = Torr
01 = mTorr
02 = mBar
03 = µBar
04 = kPa

MKS 651D Series Specifications

General

Brand	MKS
Model	651D Series
Category	Controller
Language	English