Home
MKS
Control Unit
Mini-Convectron 275 Series
MKS Mini-Convectron 275 Series User Manual
5
of 1
of 1 rating
64 pages
Give review
Manual
Specs
To Next Page
To Next Page
To Previous Page
To Previous Page
Loading...
Operation
Mini-Convectron Module Instruction Manual -
275513
43
Figure 3-14
Example Test Point Voltage: 4.8 V equals 40 Torr (5.33 kPa,
53.3 mbar) of N
2
or Air
42
44
Table of Contents
List of Catalog Numbers
4
Table of Contents
5
Safety
7
Installation
15
2.1 Module Components
15
2.2 Installing Pressure Relief Devices
16
2.3 Installation Procedure
16
2.3.1 Locate and orient the module
16
2.3.2 Attach the module to the vacuum chamber
18
2.3.3 Assemble and connect the wiring
19
2.3.4 Grounding
21
2.3.5 Configure the setpoint relays for the application
22
2.3.6 Calibrate the Convectron gauge
22
Operation
23
3.1 Preparing to Operate the Module
23
3.2 Nonlinear Analog Output
28
3.2.1 Commonly used Gases Other than N2 or Air
28
3.2.2 Other Gases
28
3.3 Setpoint Relays
39
3.3.1 Preparing to Adjust Setpoint Relays
40
3.3.2 Adjusting Setpoint Relays
40
3.4 Reading Relay Status
44
3.4.1 If the module without a display has one setpoint relay:
44
3.4.2 If the module has a digital display:
44
3.5 Calibrate the Convectron Gauge at Atmospheric Pressure
44
3.5.1 If the module does not have a digital display:
44
3.5.2 If the module has a digital display:
44
3.6 Calibrate the Convectron Gauge at Vacuum Chamber Pressure
45
3.6.1 If the module does not have a digital display:
45
3.6.2 If the module has a digital display:
45
3.7 Modules Operating at Low Pressure
46
3.8 Factory Settings
46
Maintenance
47
4.1 Customer Service
47
4.1.1 Damage Requiring Service
47
4.2 Troubleshooting
48
4.2.1 Precautions
48
4.2.2 Symptoms, Causes, and Solutions
49
4.3 Convectron Gauge Test
50
4.4 Convectron Gauge Removal and Replacement
51
4.4.1 Removing the Convectron Gauge
51
4.4.2 Replacing the Convectron Gauge
51
Specifications
53
Theory of Operation
57
Index
59
5
Based on 1 rating
Ask a question
Give review
Questions and Answers:
Need help?
Do you have a question about the MKS Mini-Convectron 275 Series and is the answer not in the manual?
Ask a question
MKS Mini-Convectron 275 Series Specifications
General
Brand
MKS
Model
Mini-Convectron 275 Series
Category
Control Unit
Language
English
Related product manuals
Granville-Phillips Mini-Convectron 275 series
68 pages
MKS 253B-2-2-2
54 pages
MKS 390 Series
100 pages
MKS T3B Series
59 pages
MKS 253B-1-40-2
54 pages
MKS T3BIA
59 pages
MKS SENTRY 1510A
56 pages
MKS AX Series
24 pages
MKS Microvision2
50 pages
MKS Mass-Flo 1179A
88 pages
MKS Mass-Flo 2179A
88 pages
Need help?
General
To Next Page
