Maintenance
Change chamber lid gasket
11.06.2014 75
¾ Remove the chamber lid gasket from the groove.
¾ Press the new chamber lid gasket into the groove of the chamber
lid.
– The beginning and end of the chamber lid gasket must butt up
against each other without a gap.
¾ During insertion, do not stretch the chamber lid gasket.
¾ Smooth the chamber lid gasket flat.
¾ Check the chamber for leaks, see Section 7.9 "CHECK THE CHAM-
BER FOR LEAKS".
7.9 Check the chamber for leaks
¾ Switch on the machine.
¾ Press the <Evacuation> key.