Newport XPS-D User Manual

XPS-D Controller User Interface Manual
2.28 Files – Trajectory Files ............................................................................................. 36
2.29 Files – TCL Scripts ................................................................................................... 37
2.30 Files – Configuration Files ........................................................................................ 38
2.31 Files – Log Files........................................................................................................ 39
2.32 Documentation .......................................................................................................... 40
Service Form ........................................................................................................ 41
EDH0405En1012 – 09/18 iv

Newport XPS-D Specifications

General

Brand	Newport
Model	XPS-D
Category	Controller
Language	English