50 XTM0011-F2 XT V 160 X-ray System
3. Check all indicator lamps for correct functionality.
4. Check inside the cabinet for any foreign objects. Nothing should be left anywhere inside
the cabinet.
5. Run through the power-up sequence and note anything unusual.
Weekly
An operator should perform the following checks on a weekly basis:
1. Operate the manipulator through the whole of its range to check for unusual noises,
which might indicate a loose drive chain or any jamming of the mechanism. Also, check
that the end of travel limits operate correctly by moving each axis to both limits of travel.
Any problems will require the attention of a trained engineer.
2. Check that all switches and warning lamps operate correctly.
3. Check that the external cooling fans are producing a reasonable flow of air and are not
producing any unusual noises.
Monthly
Access to the service area of the system is required to perform monthly maintenance tasks.
A Nikon Metrology-trained supervisor should perform the following tasks on a monthly basis:
1. Check all electrical connections for physical security.
2. Check cables for signs of deterioration or damage.
3. Check all connections to accessories fitted to the system and computer.
4. Check all cooling and filter vents on the back of the cabinet and top and bottom of the
X-ray source for obstructions, and clean as necessary.
5. Check all vacuum system connections for security.
6. Check the cooling system and coolant level.
7. Check the oil level in the backing pump.
8. Check the emergency stop button(s) function correctly.
9. Unplug one of the coolant hoses from the target and check the coolant flow interlock
functions. Have absorbent material available to clean up any leakage.
6.2 Routine maintenance
As a rule, it is recommended that Nikon Metrology-trained personnel carry out annual service
maintenance on a regular basis. After every three years, the X-ray source should be
overhauled by a Nikon Metrology-trained service engineer in accordance with the X-ray
source overhaul procedure. To ensure optimum performance of the microfocus system, it is
recommended that the following user maintenance regime be followed.
6.2.1 Access the service area
To check the oil level in the backing pump and level of coolant in the cooling system, you
need to remove the service access cover on the right side of the machine.
Before you do this, ensure that you read and act on all advice and warnings. Refer to the
Important health and safety information (on page 1) for details.
A trained supervisor or operator should only gain access to the service
area of the machine when the system has been powered down.
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