XT V 160 X-ray System XTM0011-F2 79
7 Troubleshooting
This section is designed to assist in returning the X-ray system to a fully serviceable
condition if a problem occurs. The normal first indication of a problem is that no X-ray image
can be viewed on the monitor.
When investigating faults, the following checks must only be carried
out by a Nikon Metrology-trained service engineer:
1. Imaging power supply checks.
2. Turbo pump control board testing.
3. Door switch replacement and setting.
7.1 Simple fault finding procedures
There is no image.
Check to see whether X-rays are being produced. You can do this by placing a radiation
test monitor or fluorescent flat screen in the cabinet and switching X-rays on in Inspect-X.
X-rays are being produced, but there is still no image.
Check whether the image unit has power. If there is power, there is a hardware problem -
contact Support.
Check you are displaying a 'live' image in Inspect-X.
In Inspect-X, adjust the beam current demand value. If the actual value remains at zero,
then change the filament.
No X-rays are being produced.
Check the X-ray status; if it shows 'NO INTERLOCK', check the System Status window to
monitor the vacuum in the source and to see which interlocks have not been made.
See Check the status of the system (on page 37) for instructions.
Check that X-rays have been switched on.
X-rays do not stay on; they switch off on their own.
Auto-condition the X-ray source.
There is still no image with X-rays switched on and 'live' image selected.
Ensure the beam energy and beam current are set to > 0.
If the kV actual is > 0 and the µA = 0, check the filament and filament demand.
If the filament has recently been changed, check the filament position is correct, reset the
filament demand and re-align the electron beam.
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