Quorum Q150T S - Sputtering Deposition Rate; Figure 9-1. Sputtering Deposition Rate Using Gold

Q150T Sample Preparation System
Q150T - Instruction Manual 85 10473 - Issue 5
9.4 Sputtering Deposition Rate
These graphs are provided for guidance only and are not to be taken for
absolute reference
0.0
10.0
20.0
30.0
40.0
50.0
60.0
70.0
80.0
90.0
10 20 30 40 50 60 70 80
Deposition Current (mA)
Deposition Rate (nm/min)
7*10-3
1*10-2
Figure 9-1. Sputtering Deposition Rate using Gold
Gold tooling factor = 2.7