4-171
Troubleshooting
● Code : B-2 ● Vertical White Band
● Symptom :
-. Vertical White Band
● Possible Cause:
1. Exposure defect by LSU contamination
2. A contaminant sticks to Dr.Gap.
3. OPC, ITB scratch
● Troubleshooting method :
If the sharp vertical white band has occurred, it is likely due to LSU optical path contamination.
(1) Check if there is any contaminant on exposure window of the imaging unit.
(2) Check if there is any contaminant on exposure path in set.
(3) Check if the LSU window is contaminated.
- Clean the LSU window or replace the LSU.
(4) If the problem persists, replace the imaging unit.
Y
M
C
K
[Case 1] Exposure defect by LSU contamination